Research Contents :
Process Technology for Semiconductor Fabrication
·Simulation Technology for Semiconductor Fabrication Equipment
·Example of Molecular Dynamic Simulation
·A Study of Electrochemical Deposition for Semiconductor Devices
Simulation Technology for Semiconductor Fabrication Equipment
Various simulation technologies are studied and applied to equipment for semiconductor device fabrication for the development and improvement of their performance.
Example of nanotopography calculation
Examples of CMP Simulation
Calculation model for CMP
Calculation result of CMP pressure distribution
Step height reduction characteristics
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Biotechnology for Environmental Process
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Next Generation of Etching System
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Development of Functional Polymer Materials
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Process Technology for Semiconductor Fabrication
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Development of High Temperature Corrosion Resistance Alloy
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Analysis of Sand Erosion and Coating Technology
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Evaluation Technology for Strucural Materials
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Technology for Flow Optimization
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Fundamental Technology for Rotating Machinery
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